測定例：Si 1s
| name | unit | Si wafer |
| orbit | Si 1s | |
| source | Ga Kα | |
| source energy | eV | 9251.74 |
| pass energy | eV | 200 |
| start energy (kinetic) | eV | 7398 |
| end energy (kinetic) | eV | 7414 |
| start energy (binding) | eV | 1850.04 |
| end energy (binding) | eV | 1834.04 |
| energy step | eV | 0.1 |
| dwell / point | sec | 1 |
| number of sweep | 1 | |
| mode | sweep | |
| total measurement time | min | 5.6 |
| entrance slit | mm | 0.5 |
| lens mode | transmission | |
| energy offset (work function) | 3.7 | |
| data points | 161 | |
| take off angle | deg | 88 |
| neutralize | ||
| comment |